Formation process and microstructural evolution of...

Formation process and microstructural evolution of Ni-silicide layers grown by chemical vapor deposition of Si on Ni substrates

Jin-Kook Yoon, Ji-Young Byun, Gyeung-Ho Kim, Jong-Kwon Lee, Ho-Sang Yoon, Kyung-Tae Hong
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Volume:
168
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(03)00269-x
File:
PDF, 2.20 MB
english, 2003
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