Plasma-deposited parylene-like thin films: process and...

Surface and Coatings Technology 2003 Vol. 174-175; Iss. none

Plasma-deposited parylene-like thin films: process and material properties

B. Mitu, S. Bauer-Gogonea, H. Leonhartsberger, M. Lindner, S. Bauer, G. Dinescu
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Volume:
174-175
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(03)00329-3
File:
PDF, 1.07 MB
english, 2003
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