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SPM investigation of diamond-like carbon and carbon nitride films
Dongping Liu, Günther Benstetter, Edgar Lodermeier, Ihar Akula, Ihar Dudarchyk, Yanhong Liu, Tengcai MaVolume:
172
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(03)00338-4
File:
PDF, 1.43 MB
english, 2003