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Controlling the texture of CeO2 films by room temperature RF magnetron sputtering
Ha-Yong Lee, Sun-Il Kim, Young-Pyo Hong, Young-Cheol Lee, Yong-Hwan Park, Kyung-Hyun KoVolume:
173
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(03)00387-6
File:
PDF, 824 KB
english, 2003