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Diamond thin film growth by pulsed microwave plasma at high power density in a CH4–H2 gas mixture
T. Lamara, M. Belmahi, J. Bougdira, F. Bénédic, G. Henrion, M. RémyVolume:
174-175
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00585-1
File:
PDF, 433 KB
english, 2003