Al+ Ion Implanted On-Axis <0001>...

Materials Science Forum 2015 / 6 Vol. 821-823

Al+ Ion Implanted On-Axis <0001> Semi-Insulating 4H-SiC

Nipoti, Roberta, Parisini, Antonella, Carnera, Alberto, Albonetti, Cristiano, Vantaggio, Salvatore, Grossner, Ulrike
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.399
Date:
June, 2015
File:
PDF, 382 KB
english, 2015
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