A Study on the Chemistry of Epitaxial Ti3SiC2 Formation on 4H-SiC Using Al-Ti Annealing
Abi-Tannous, Tony, Soueidan, Maher, Ferro, Gabriel, Lazar, Mihai, Toury, Berangère, Beaufort, Marie France, Barbot, Jean François, Penuelas, J., Planson, DominiqueVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.432
Date:
June, 2015
File:
PDF, 1.54 MB
english, 2015