![](/img/cover-not-exists.png)
Extremely Enhanced Diffusion of Nitrogen in 4H-SiC Observed in Liquid-Nitrogen Immersion Irradiation of Excimer Laser
Ikeda, Akihiro, Marui, Daichi, Ikenoue, Hiroshi, Asano, TanemasaVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.448
Date:
June, 2015
File:
PDF, 671 KB
english, 2015