Direct Observation of Dielectric Breakdown at Step-Bunching...

Materials Science Forum 2015 / 6 Vol. 821-823

Direct Observation of Dielectric Breakdown at Step-Bunching on 4H-SiC

Mori, Yuki, Matsumura, Mieko, Hamamura, Hirotaka, Mine, Toshiyuki, Shima, Akio, Yamada, Renichi, Shimamoto, Yasuhiro
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.468
Date:
June, 2015
File:
PDF, 986 KB
english, 2015
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