Comparison of Different Novel Chip Separation Methods for...

Materials Science Forum 2015 / 6 Vol. 821-823

Comparison of Different Novel Chip Separation Methods for 4H-SiC

Dohnke, Karl Otto, Kaspar, Korbinian, Lewke, Dirk
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.520
Date:
June, 2015
File:
PDF, 2.92 MB
english, 2015
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