Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC

Materials Science Forum 2015 / 6 Vol. 821-823

Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC

Nipoti, Roberta, Moscatelli, Francesco, Roncaglia, Alberto, Bonafè, Filippo, Mancarella, Fulvio, de Nicola, Pietro, Nath, Anindya, Rao, Mulpuri V.
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.620
Date:
June, 2015
File:
PDF, 295 KB
english, 2015
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