Electrical Properties Evaluation on High Quality Hetero-Epitaxial 3C-SiC(001) for MOSFET Applications
Anzalone, Ruggero, Privitera, Stefania, Alberti, Alessandra, Piluso, Nicolo’, Fiorenza, Patrick, La Via, FrancescoVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.773
Date:
June, 2015
File:
PDF, 372 KB
english, 2015