Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor
Roncaglia, Alberto, Anzalone, Ruggero, Belsito, Luca, Mancarella, Fulvio, Camarda, Massimo, Piluso, Nicolo’, Nipoti, Roberta, La Via, FrancescoVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.902
Date:
June, 2015
File:
PDF, 851 KB
english, 2015