![](/img/cover-not-exists.png)
Alloyed and hydrogenated diamond-like carbon thin films deposited by a new high performance microwave low pressure plasma source
L. Niederberger, H. Holleck, H. Leiste, M. Stüber, S. Ulrich, H. BaumannVolume:
174-175
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(03)00612-1
File:
PDF, 467 KB
english, 2003