Study of ZrN layers deposited by reactive magnetron sputtering
M. Del Re, R. Gouttebaron, J.-P. Dauchot, P. Leclère, G. Terwagne, M. HecqVolume:
174-175
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00679-0
File:
PDF, 503 KB
english, 2003