Structure and properties of titanium oxide layers prepared...

Structure and properties of titanium oxide layers prepared by metal plasma immersion ion implantation and deposition

I Tsyganov, M.F Maitz, E Wieser, F Prokert, E Richter, A Rogozin
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Volume:
174-175
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00687-x
File:
PDF, 536 KB
english, 2003
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