![](/img/cover-not-exists.png)
Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel
Bao-Shun Yau, Jow-Lay HuangVolume:
176
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00768-0
File:
PDF, 706 KB
english, 2004