Low temperature silicon dioxide film deposition by remote...

Low temperature silicon dioxide film deposition by remote plasma enhanced chemical vapor deposition: growth mechanism

Young-Bae Park, Shi-Woo Rhee
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Volume:
179
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(03)00852-1
File:
PDF, 1.03 MB
english, 2004
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