Microstructure of titanium nitride thin films controlled by ion bombardment in a magnetron-sputtering device
R. Černý, R. Kužel Jr., V. Valvoda, S. Kadlec, J. MusilVolume:
64
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(09)90011-1
File:
PDF, 498 KB
english, 1994