The use of ion effects on the surface in deposition and...

The use of ion effects on the surface in deposition and etching of thin films and coatings

G. Kuznetsov, V. Delian
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Volume:
54-55
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(09)90034-2
File:
PDF, 492 KB
english, 1992
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