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Planar magnetron-sputtering system with obliquely facing targets
Kikuo Tominaga, Hiroshi Imai, Yasuhiko Sueyoshi, Masaki ShiraiVolume:
54-55
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(09)90041-x
File:
PDF, 588 KB
english, 1992