Examination of residual stress, morphology and mechanical...

Surface and Coatings Technology 1992 Vol. 54-55; Iss. part-P1

Examination of residual stress, morphology and mechanical properties of sputtered TiN films

F. Höhl, H.-R. Stock, P. Mayr
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Volume:
54-55
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(09)90044-5
File:
PDF, 3.03 MB
english, 1992
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