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Deposition of multilayer hard coatings using kinetically controlled chemical vapour deposition processes
K. Bartsch, A. Leonhardt, E. WolfVolume:
54-55
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(09)90049-4
File:
PDF, 2.76 MB
english, 1992