Low pressure chemical vapor deposition of massive Si1-xGex...

Surface and Coatings Technology 1992 Vol. 54-55; Iss. part-P1

Low pressure chemical vapor deposition of massive Si1-xGex gradient crystals and applications in short-wavelength diffraction

R. Madar, E. Mastromatteo, A. Magerl, K.-D. Liss, C. Bernard
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Volume:
54-55
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(09)90055-x
File:
PDF, 1.09 MB
english, 1992
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