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Sputtered silver and Cr—C films for applications as interconnect materials
N. Maréchal, Y. Pauleau, S. PaïdassiVolume:
54-55
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(09)90069-x
File:
PDF, 388 KB
english, 1992