Thin film deposition techniques utilizing the anodic vacuum...

Thin film deposition techniques utilizing the anodic vacuum arc

S. Meassick, C. Chan, R. Allen
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Volume:
54-55
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(09)90074-3
File:
PDF, 1.63 MB
english, 1992
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