Working gas pressure and flow effects on reactively...

Surface and Coatings Technology 1992 Vol. 54-55; Iss. part-P1

Working gas pressure and flow effects on reactively sputtered molybdenum oxide thin films

A.F. Jankowski, L.R. Schrawyer
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Volume:
54-55
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(09)90075-5
File:
PDF, 448 KB
english, 1992
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