[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - Polymer coated MEMS resonator for room temperature NH3 sensing
Dam, V.A.T., Wouters, D., Knoben, W., Brongersma, S.H., van Schaijk, R.Year:
2014
Language:
english
DOI:
10.1109/icsens.2014.6984966
File:
PDF, 870 KB
english, 2014