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Ion implantation of TiN films with carbon or nitrogen for improved tribomechanical properties
D. Sansom, J.L. Viviente, F. Alonso, J.J. Ugarte, J.I. OñateVolume:
84
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(95)02769-6
File:
PDF, 462 KB
english, 1996