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Development of a plasma immersion ion implanter for the surface treatment of metal components
G.A. Collins, R. Hutchings, K.T. Short, J. Tendys, C.H. Van Der ValkVolume:
84
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(95)02792-0
File:
PDF, 720 KB
english, 1996