Dual ion-beam deposition of metallic thin films

Dual ion-beam deposition of metallic thin films

Tomás Sikola, Jiri Spousta, Libuse Dittrichová, Alois Nebojsa, Vratislav Perina, Radek Ceska, Petr Dub
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Volume:
84
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(95)02823-4
File:
PDF, 538 KB
english, 1996
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