The deposition of TiN thin films by nitrogen ion assisted...

Surface and Coatings Technology 1996 Vol. 86-87; Iss. part-P1

The deposition of TiN thin films by nitrogen ion assisted deposition of Ti from a filtered cathodic arc source

P.J. Martin, A. Bendavid, T.J. Kinder, L. Wielunski
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
86-87
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(96)02978-7
File:
PDF, 917 KB
english, 1996
Conversion to is in progress
Conversion to is failed