Process diagnostics during the deposition of cubic boron nitride
R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. RichterVolume:
90
Year:
1997
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(96)03149-0
File:
PDF, 884 KB
english, 1997