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Characterization of magnetron-sputtered chromium and iron nitride films
T. Kacsich, M. Niederdrenk, P. Schaaf, K.P. Lieb, U. Geyer, O. SchulteVolume:
93
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00035-2
File:
PDF, 491 KB
english, 1997