Study of an RF planar magnetron sputtering discharge with Langmuir probe measurements
P.-Y. Jouan, A.-C. Vanderbecq, J.-P. Dauchot, M. Wautelet, M. HecqVolume:
98
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(97)00146-1
File:
PDF, 585 KB
english, 1998