Influence of a modulated magnetic field on the behavior of...

Surface and Coatings Technology 1997 Vol. 97; Iss. 1-3

Influence of a modulated magnetic field on the behavior of particulates in silane plasma CVD

Sung-Chae Yang, Yoko Maemura, Kazuhiko Tazoe, Yoshinobu Matsuda, Hiroshi Fujiyama
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Volume:
97
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00164-3
File:
PDF, 234 KB
english, 1997
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