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An improved optical cantilever technique using image processing for measuring in situ stress in thin films
G. Moulard, G. Contoux, G. Gardet, G. Motyl, M. CourbonVolume:
97
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00190-4
File:
PDF, 354 KB
english, 1997