An improved optical cantilever technique using image...

An improved optical cantilever technique using image processing for measuring in situ stress in thin films

G. Moulard, G. Contoux, G. Gardet, G. Motyl, M. Courbon
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Volume:
97
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00190-4
File:
PDF, 354 KB
english, 1997
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