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Determination of O atom density in Ar-O2 and Ar-O2-H2 flowing microwave discharges
T. Czerwiec, J. Gavillet, T. Belmonte, H. Michel, A. RicardVolume:
98
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00256-9
File:
PDF, 601 KB
english, 1998