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An emission actinometric method for measuring of plasmachemical reaction kinetic parameters with discharge power modulation by a series of short probing pulses
V. Shogun, A. Tyablikov, M. Abachev, V. Pashkov, W. Scharff, T. WallendorfVolume:
98
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00259-4
File:
PDF, 683 KB
english, 1998