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Deposition of AlN layers by collimation magnetron sputtering
Krzysztof Miernik, Jan Walkowicz, Jerzy SmolikVolume:
98
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00262-4
File:
PDF, 1.01 MB
english, 1998