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High-rate reactive sputtering of yttria-stabilized zirconia using pulsed d.c. power
P. Yashar, J. Rechner, M.S. Wong, W.D. Sproul, S.A. BarnettVolume:
94-95
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00270-3
File:
PDF, 622 KB
english, 1997