Deposition of carbon nitride thin films in a hybrid r.f.-PLD technique
T. Klotzbücher, M. Scherge, M. Mergens, D.A. Wesner, E.W. KreutzVolume:
98
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(97)00286-7
File:
PDF, 967 KB
english, 1998