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Mechanisms of diamond films deposition from MPACVD in methane-hydrogen and nitrogen mixtures
H. Chatei, J. Bougdira, M. Remy, P. AlnotVolume:
98
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(97)00289-2
File:
PDF, 956 KB
english, 1998