Numerical modelling of charged particle motion in electric...

Surface and Coatings Technology 1997 Vol. 97; Iss. 1-3

Numerical modelling of charged particle motion in electric and magnetic fields to assist magnetron design

J.-S. Liebig, P. Frach, H. Bartzsch, D. Schulze, H. Schwanbeck
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Volume:
97
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(97)00336-8
File:
PDF, 477 KB
english, 1997
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