Plasma diagnostics of r.f. PACVD of boron nitride using a BCl3−N2−H2−Ar gas mixture
C. Schaffnit, L. Thomas, F. Rossi, R. Hugon, Y. PauleauVolume:
98
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00368-x
File:
PDF, 610 KB
english, 1998