Deposition of superhard amorphous carbon films by pulsed vacuum arc deposition
B. Schultrich, H.-J. Scheibe, D. Drescher, H. ZiegeleVolume:
98
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00386-1
File:
PDF, 574 KB
english, 1998