Investigation of the mechanisms of magnetron sputtering of...

Investigation of the mechanisms of magnetron sputtering of aluminium with mixtures of argon and nitrogen in the partially reactive mode

J. Schulte, G. Sobe
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Volume:
97
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00405-2
File:
PDF, 273 KB
english, 1997
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