Synthesis and characterization of thin films of WCx...

Surface and Coatings Technology 1997 Vol. 94-95; Iss. none

Synthesis and characterization of thin films of WCx produced by mixing W and C plasma streams

Othon R. Monteiro, Marie-Paule Delplancke-Ogletree, Roger Yu Lo, Rene Winand, Ian Brown
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Volume:
94-95
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00453-2
File:
PDF, 558 KB
english, 1997
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