![](/img/cover-not-exists.png)
Spectroscopic studies of a magnetron sputtering discharge for boron nitride deposition
R. Pintaske, Th. Welzel, M. Schaller, N. Kahl, J. Hahn, F. RichterVolume:
99
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(97)00566-5
File:
PDF, 636 KB
english, 1998