An experimental study of chemical vapour deposition of...

An experimental study of chemical vapour deposition of tungsten on Ti/TiN adhesion bilayers: mechanical properties

A. Mouroux, S.-L. Zhang, C.S. Petersson, R. Palmans, K. Maex, T. Ahlgren, J. Keinonen
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Volume:
99
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(97)00567-7
File:
PDF, 620 KB
english, 1998
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